M Series
The M Series is the ultimate in high performance for the smallest x-ray spot sizes. The poly-capillary optics in the M Series is more advanced than the O Series, focusing the x-ray beam down to 15μm FWHM. To measure features on that scale, a 150x magnification camera is included. The field of view becomes more limited with higher magnification, so a second camera takes a macro-image of the part to be measured. The dual-camera system allows operators to see the entire part, click the image to zoom in with the high-mag camera, and pinpoint the feature to be measured.
The high-precision programmable X-Y stage can be used to select and measure multiple points; the pattern recognition software can also do this automatically. There is a 2-D mapping system that can be used to see the topography of a coating over the surface area of a part such as a silicon wafer.
The standard configuration includes the 15μm Optics, and a high resolution SDD detector to process the higher count rates. A micro/macro camera system has one camera with 150x magnification and even higher digital zoom. A programmable X-Y sample stage is also standard. The Optics system has a close focal distance, so samples measured with the the M Series must be flat.
Application Performance
ENEPIG | Electroless Nickel | ||||
---|---|---|---|---|---|
μm Au | μm Pd | μm Ni | μm NiP | μm %P | |
Ave | 0.0427 | 0.08 | 3.72 | 10.2015 | 10.17 |
StdDev | 0.00045 | 0.0009 | 0.000985 | 0.1089 | 0.29 |
Range | 0.0015 | 0.003 | 0.0395 | 0.3863 | 0.99 |
%RSD | 1.053% | 1.121% | 0.265% | 1.067% | 2.85% |
Product Specification
X-ray excitation: | 50 W Mo target Flex-Beam Capillary Optics @15 FWHM |
Detector: | Silicon drifted detector with 135eV resolution |
Number of analysis layers and elements: | 5 layers (4 layers + base) and 10 elements in each layer with composition analysis of up to 25 elements simultaneously |
Filters/Collimators: | 4 primary filters |
Focal Depths: | Fixed at 0.05″ |
Digital Pulse Processing: | 4096 CH digital multi-channel analyser with flexible shaping time Automatic signal processing including dead time correction and escape peak correction |
Computer: | Intel, CORE i5 3470 Processor (3.2GHz), 8GB DDR3 Memory, Microsoft Windows 10 Prof, 64-bit equivalent |
Camera optics: | 1/4″ CMOS-1280×720 VGA resolution, 250X with Dual Camera or 45X with Single Camera on 15″ screen |
Power Supply: | 150W, 100-240 volts, with frequency range of 47Hz to 63Hz |
Working Environment: | 50°F (10°C) to 104°F (40°C) and up to 98% RH, non-condensing |
Weight: | 70kg |
Programmable XY: | Table size: 17″ x 16″ | Travel: 6.5″ x 6.5″ high precision |
Internal Dimensions: | Height: 140mm (5.5″), Width: 310mm (12″), Depth: 340mm (13″) |
External Dimensions: | Height: 500mm (20″), Width: 450mm (18″), Depth: 600mm ( 24″) |