M Series

The M Series is the ultimate in high performance for the smallest x-ray spot sizes. The poly-capillary optics in the M Series is more advanced than the O Series, focusing the x-ray beam down to 15μm FWHM. To measure features on that scale, a 150x magnification camera is included. The field of view becomes more limited with higher magnification, so a second camera takes a macro-image of the part to be measured. The dual-camera system allows operators to see the entire part, click the image to zoom in with the high-mag camera, and pinpoint the feature to be measured.

The high-precision programmable X-Y stage can be used to select and measure multiple points; the pattern recognition software can also do this automatically. There is a 2-D mapping system that can be used to see the topography of a coating over the surface area of a part such as a silicon wafer.

The standard configuration includes the 15μm Optics, and a high resolution SDD detector to process the higher count rates. A micro/macro camera system has one camera with 150x magnification and even higher digital zoom. A programmable X-Y sample stage is also standard. The Optics system has a close focal distance, so samples measured with the the M Series must be flat.

Application Performance

ENEPIGElectroless Nickel
μm Auμm Pdμm Niμm NiPμm %P


Product Specification

X-ray excitation:50 W Mo target Flex-Beam Capillary Optics @15 FWHM
Detector:Silicon drifted detector with 135eV resolution
Number of analysis 
layers and elements:
5 layers (4 layers + base) and 10 elements in each layer with composition analysis of up to 25 elements simultaneously
Filters/Collimators:4 primary filters
Focal Depths:Fixed at 0.05″
Digital Pulse Processing:4096 CH digital multi-channel analyser with flexible shaping time Automatic signal processing including dead time correction and escape peak correction
Computer:Intel, CORE i5 3470 Processor (3.2GHz), 8GB DDR3 Memory, Microsoft Windows 10 Prof, 64-bit equivalent
Camera optics:1/4″ CMOS-1280×720 VGA resolution, 250X with Dual Camera or 45X with Single Camera on 15″ screen
Power Supply:150W, 100-240 volts, with frequency range of 47Hz to 63Hz
Working Environment:50°F (10°C) to 104°F (40°C) and up to 98% RH, non-condensing
Programmable XY:Table size: 17″ x 16″ | Travel: 6.5″ x 6.5″ high precision
Internal Dimensions:Height: 140mm (5.5″), Width: 310mm (12″), Depth: 340mm (13″)
External Dimensions:Height: 500mm (20″), Width: 450mm (18″), Depth: 600mm ( 24″)